Publication:

CNT EUV pellicle tunability and performance in a scanner-like environment

Date

2021
Proceedings Paper
https://doi.org/10.1117/12.2584519
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Author(s)

Timmermans, Marina  
;
Pollentier, Ivan  
;
Korytov, Maxim  
;
Nuytten, Thomas  
;
Sergeant, Stefanie  
;
Conard, Thierry  
;
Meersschaut, Johan  
;
Zhang, Yide  
;
Dialameh, Masoud  
;
Alaerts, Wilfried  
;
Jazaeri, Ehsan  
;
Spampinato, Valentina  
;
Franquet, Alexis  
;
Brems, Steven  
;
Huyghebaert, Cedric  
;
Gallagher, Emily  

Journal

Proceedings of SPIE

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1509 since deposited on 2021-11-02
1last month
Acq. date: 2026-01-10

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