CNT EUV pellicle tunability and performance in a scanner-like environment

Timmermans, Marina; Pollentier, Ivan; Korytov, Maxim; Nuytten, Thomas; Sergeant, Stefanie; Conard, Thierry; Meersschaut, Johan; Zhang, Yide; Dialameh, Masoud; Alaerts, Wilfried; Jazaeri, Ehsan; Spampinato, Valentina; Franquet, Alexis; Brems, Steven; Huyghebaert, Cedric; Gallagher, Emily

doi:10.1117/12.2584519

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CNT EUV pellicle tunability and performance in a scanner-like environment

Date

2021

Proceedings Paper

https://doi.org/10.1117/12.2584519

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Spampinato, Valentina

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Proceedings of SPIE

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Acq. date: 2026-10-08

CNT EUV pellicle tunability and performance in a scanner-like environment

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