Publication:

Unsupervised Machine Learning based CD-SEM image segregator for OPC and Process Window Estimation

Date

2020
Proceedings Paper
https://doi.org/10.1117/12.2552055
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

113281G.pdf 767.5 KB

Author(s)

Dey, Bappaditya  
;
Cerbu, Dorin  
;
Khalil, Kasem
;
Halder, Sandip  
;
Leray, Philippe  
;
Das, Sayantan  
;
Sherazi, Yasser  
;
Bayoumi, Magdy A.
;
Kim, Ryan Ryoung han

Journal

NA

Abstract

Description

Metrics

Downloads

186 since deposited on 2021-11-02
25last month
6last week
Acq. date: 2026-01-07

Views

1890 since deposited on 2021-11-02
Acq. date: 2026-01-07

Citations

Metrics

Downloads

186 since deposited on 2021-11-02
25last month
6last week
Acq. date: 2026-01-07

Views

1890 since deposited on 2021-11-02
Acq. date: 2026-01-07

Citations