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Unsupervised Machine Learning based CD-SEM image segregator for OPC and Process Window Estimation
dc.contributor.author | Dey, Bappaditya | |
dc.contributor.author | Cerbu, Dorin | |
dc.contributor.author | Khalil, Kasem | |
dc.contributor.author | Halder, Sandip | |
dc.contributor.author | Leray, Philippe | |
dc.contributor.author | Das, Sayantan | |
dc.contributor.author | Sherazi, Yasser | |
dc.contributor.author | Bayoumi, Magdy A. | |
dc.contributor.author | Kim, Ryoung Han | |
dc.date.accessioned | 2021-11-02T15:58:54Z | |
dc.date.available | 2021-11-02T15:58:54Z | |
dc.date.issued | 2021 | |
dc.identifier.issn | 0277-786X | |
dc.identifier.other | WOS:000671888300037 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/37726 | |
dc.source | WOS | |
dc.title | Unsupervised Machine Learning based CD-SEM image segregator for OPC and Process Window Estimation | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Dey, Bappaditya | |
dc.contributor.imecauthor | Cerbu, Dorin | |
dc.contributor.imecauthor | Halder, Sandip | |
dc.contributor.imecauthor | Leray, Philippe | |
dc.contributor.imecauthor | Das, Sayantan | |
dc.contributor.imecauthor | Sherazi, Yasser | |
dc.contributor.imecauthor | Kim, Ryoung Han | |
dc.contributor.orcidext | Khalil, Kasem::0000-0002-9659-8566 | |
dc.contributor.orcidimec | Dey, Bappaditya::0000-0002-0886-137X | |
dc.contributor.orcidimec | Halder, Sandip::0000-0002-6314-2685 | |
dc.contributor.orcidimec | Das, Sayantan::0000-0002-3031-0726 | |
dc.identifier.doi | 10.1117/12.2552055 | |
dc.identifier.eisbn | 978-1-5106-3424-4 | |
dc.source.numberofpages | 11 | |
dc.source.peerreview | yes | |
dc.source.conference | Conference on Design-Process-Technology Co-Optimization for Manufacturability XIV | |
dc.source.conferencedate | FEB 26-27, 2020 | |
dc.source.conferencelocation | San Jose | |
dc.source.volume | 11328 | |
imec.availability | Under review |
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