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Unsupervised Machine Learning based CD-SEM image segregator for OPC and Process Window Estimation
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Authors
Dey, Bappaditya
;
Cerbu, Dorin
;
Khalil, Kasem
;
Halder, Sandip
;
Leray, Philippe
;
Das, Sayantan
;
Sherazi, Yasser
;
Bayoumi, Magdy A.
;
Kim, Ryan Ryoung han
DOI
10.1117/12.2552055
EISBN
978-1-5106-3424-4
ISSN
0277-786X
Conference
Conference on Design-Process-Technology Co-Optimization for Manufacturability XIV
Journal
NA
Volume
11328
Title
Unsupervised Machine Learning based CD-SEM image segregator for OPC and Process Window Estimation
Publication type
Proceedings paper
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4
20.500.12860/37726.4
*
2021-11-05T09:53:31Z
validation by imec author
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20.500.12860/37726.3
2021-11-05T09:14:04Z
validation by library/open access desk
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20.500.12860/37726.2
2021-11-03T11:02:20Z
validation by imec author
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20.500.12860/37726
2021-11-02T15:58:54Z
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