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3D sequential low temperature top tier devices using dopant activation with excimer laser anneal and strained silicon as performance boosters
dc.contributor.author | Vandooren, A. | |
dc.contributor.author | Wu, Z. | |
dc.contributor.author | Parihar, N. | |
dc.contributor.author | Franco, J. | |
dc.contributor.author | Parvais, B. | |
dc.contributor.author | Matagne, P. | |
dc.contributor.author | Debruyn, H. | |
dc.contributor.author | Mannaert, G. | |
dc.contributor.author | Devriendt, K. | |
dc.contributor.author | Teugels, L. | |
dc.contributor.author | Vecchio, E. | |
dc.contributor.author | Radisic, D. | |
dc.contributor.author | Rosseel, E. | |
dc.contributor.author | Hikavyy, A. | |
dc.contributor.author | Chan, B. T. | |
dc.contributor.author | Waldron, N. | |
dc.contributor.author | Mitard, J. | |
dc.contributor.author | Besnard, G. | |
dc.contributor.author | Alvarez, A. | |
dc.contributor.author | Gaudin, G. | |
dc.contributor.author | Schwarzenbach, W. | |
dc.contributor.author | Radu, I | |
dc.contributor.author | Nguyen, B. Y. | |
dc.contributor.author | Huet, K. | |
dc.contributor.author | Tabata, T. | |
dc.contributor.author | Mazzamuto, F. | |
dc.contributor.author | Demuynck, S. | |
dc.contributor.author | Boemmels, J. | |
dc.contributor.author | Collaert, N. | |
dc.contributor.author | Horiguchi, N. | |
dc.date.accessioned | 2021-11-02T15:59:26Z | |
dc.date.available | 2021-11-02T15:59:26Z | |
dc.date.issued | 2020 | |
dc.identifier.issn | 0743-1562 | |
dc.identifier.other | WOS:000668063000017 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/37753 | |
dc.source | WOS | |
dc.title | 3D sequential low temperature top tier devices using dopant activation with excimer laser anneal and strained silicon as performance boosters | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Vandooren, A. | |
dc.contributor.imecauthor | Wu, Z. | |
dc.contributor.imecauthor | Parihar, N. | |
dc.contributor.imecauthor | Franco, J. | |
dc.contributor.imecauthor | Matagne, P. | |
dc.contributor.imecauthor | Debruyn, H. | |
dc.contributor.imecauthor | Mannaert, G. | |
dc.contributor.imecauthor | Devriendt, K. | |
dc.contributor.imecauthor | Teugels, L. | |
dc.contributor.imecauthor | Vecchio, E. | |
dc.contributor.imecauthor | Radisic, D. | |
dc.contributor.imecauthor | Rosseel, E. | |
dc.contributor.imecauthor | Hikavyy, A. | |
dc.contributor.imecauthor | Chan, B. T. | |
dc.contributor.imecauthor | Waldron, N. | |
dc.contributor.imecauthor | Mitard, J. | |
dc.contributor.imecauthor | Huet, K. | |
dc.contributor.imecauthor | Demuynck, S. | |
dc.contributor.imecauthor | Boemmels, J. | |
dc.contributor.imecauthor | Collaert, N. | |
dc.contributor.imecauthor | Horiguchi, N. | |
dc.identifier.eisbn | 978-1-7281-6460-1 | |
dc.source.numberofpages | 2 | |
dc.source.peerreview | yes | |
dc.source.conference | IEEE Symposium on VLSI Technology and Circuits | |
dc.source.conferencedate | JUN 15-19, 2020 | |
imec.availability | Under review |
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