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Enabling UTBB Strained SOI Platform for Co-integration of Logic and RF: Implant-Induced Strain Relaxation and Comb-like Device Architecture

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1717 since deposited on 2021-11-02
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Acq. date: 2026-01-07

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1717 since deposited on 2021-11-02
1last month
1last week
Acq. date: 2026-01-07

Citations