Publication:
Alleviation of Negative-Bias Temperature Instability in Si p-FinFETs With ALD W Gate-Filling Metal by Annealing Process Optimization
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685 since deposited on 2021-11-02
31last month
6last week
Acq. date: 2026-08-30
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1667 since deposited on 2021-11-02
2last month
2last week
Acq. date: 2026-08-30
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