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Alleviation of Negative-Bias Temperature Instability in Si p-FinFETs With ALD W Gate-Filling Metal by Annealing Process Optimization

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Acq. date: 2026-02-24

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Downloads

500 since deposited on 2021-11-02
43last month
8last week
Acq. date: 2026-02-24

Views

1660 since deposited on 2021-11-02
1last month
Acq. date: 2026-02-24

Citations