Publication:
Alleviation of Negative-Bias Temperature Instability in Si p-FinFETs With ALD W Gate-Filling Metal by Annealing Process Optimization
Loading...
Journal
Abstract
Description
Metrics
Downloads
421 since deposited on 2021-11-02
56last month
11last week
Acq. date: 2026-01-08
Views
1659 since deposited on 2021-11-02
1last month
1last week
Acq. date: 2026-01-08
Citations
Metrics
Downloads
421 since deposited on 2021-11-02
56last month
11last week
Acq. date: 2026-01-08
Views
1659 since deposited on 2021-11-02
1last month
1last week
Acq. date: 2026-01-08
Citations