Authors

Simoen, Eddy; Claeys, Cor; Lukyanchikova, N. B.; Petrichuk, M. V.; Garbar, N. P.

Conference

Proceedings of the 8th International Autumn Meeting Gettering and Defect Engineering in Semiconductor Technology - GADEST

Title

Single defect studies by means of random telegraph signals in submicron silicon MOSFETs

Publication type

Proceedings paper

Embargo date

9999-12-31