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AlON gate dielectric and gate trench cleaning for improved relia-bility of vertical GaN MOSFET

dc.contributor.authorFilho Goncalez, Walter
dc.contributor.authorBorga, Matteo
dc.contributor.authorGeens, Karen
dc.contributor.authorCingu, Deepthi
dc.contributor.authorChatterjee, Urmimala
dc.contributor.authorYou, Shuzhen
dc.contributor.authorBakeroot, Benoit
dc.contributor.authorDecoutere, Stefaan
dc.contributor.authorKnaepen, Werner
dc.contributor.authorArnou, Panagiota
dc.contributor.authorHomm, Pia
dc.date.accessioned2021-12-03T14:19:11Z
dc.date.available2021-12-03T14:19:11Z
dc.date.issued15/03/2022
dc.identifier.issn-
dc.identifier.issnna
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38528
dc.titleAlON gate dielectric and gate trench cleaning for improved relia-bility of vertical GaN MOSFET
dc.typeProceedings paper
dc.contributor.imecauthorFilho Goncalez, Walter
dc.contributor.imecauthorBorga, Matteo
dc.contributor.imecauthorGeens, Karen
dc.contributor.imecauthorCingu, Deepthi
dc.contributor.imecauthorChatterjee, Urmimala
dc.contributor.imecauthorYou, Shuzhen
dc.contributor.imecauthorBakeroot, Benoit
dc.contributor.imecauthorDecoutere, Stefaan
dc.contributor.imecauthorKnaepen, Werner
dc.contributor.imecauthorArnou, Panagiota
dc.contributor.imecauthorHomm, Pia
dc.contributor.orcidimecBorga, Matteo
dc.contributor.orcidimecGeens, Karen
dc.contributor.orcidimecChatterjee, Urmimala
dc.contributor.orcidimecBakeroot, Benoit
dc.contributor.orcidimecDecoutere, Stefaan
dc.contributor.orcidimecBorga, Matteo::0000-0003-3087-6612
dc.contributor.orcidimecGeens, Karen::0000-0003-1815-3972
dc.contributor.orcidimecChatterjee, Urmimala::0000-0002-8934-6774
dc.contributor.orcidimecBakeroot, Benoit::0000-0003-4392-1777
dc.contributor.orcidimecDecoutere, Stefaan::0000-0001-6632-6239
dc.source.numberofpages5
dc.source.peerreviewyes
dc.subject.disciplineElectrical & electronic engineering
dc.source.conference12th International Conference on Integrated Power Electronics Systems - CIPS
dc.source.conferencedate15th to 17th of March 2022
dc.source.conferencelocationBerlin, Germany
dc.source.journal-
imec.availabilityPublished - open access


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220.500.12860/38528.22022-11-10T14:19:41Zvalidation by library/open access desk
120.500.12860/38528*2021-12-03T14:19:11Z

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