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Area-Selective Electroless Deposition of Cu for Hybrid Bonding
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Authors
Inoue, Fumihiro
;
Iacovo, Serena
;
El-Mekki, Zaid
;
Kim, Soon-Wook
;
Struyf, Herbert
;
Beyne, Eric
DOI
10.1109/LED.2021.3124960
ISSN
0741-3106
Issue
12
Journal
IEEE ELECTRON DEVICE LETTERS
Volume
42
Title
Area-Selective Electroless Deposition of Cu for Hybrid Bonding
Publication type
Journal article
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3
20.500.12860/38529.3
*
2022-04-25T09:49:47Z
validation by library/open access desk
2
20.500.12860/38529.2
2022-03-29T08:10:42Z
validation by imec author
1
20.500.12860/38529
2021-12-04T02:06:10Z
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