Publication:

Pulsed chemical vapor deposition of conformal GeSe for application as an OTS selector

Date

2021
Journal article
https://doi.org/10.1039/d0ma01014f
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Published version 5.28 MB

Author(s)

Haider, Ali  
;
Deng, Shaoren
;
Devulder, Wouter  
;
Maes, Jan Willem
;
Girard, Jean-Marc
;
Khalil El Hajjam, Gabriel
;
Kar, Gouri Sankar  
;
Opsomer, Karl  
;
Detavernier, Christophe
;
Givens, Michael
;
Goux, Ludovic  
;
Van Elshocht, Sven  
;
Delhougne, Romain  
;
Delabie, Annelies  
;
Caymax, Matty  
;
Swerts, Johan  
;
Khalil

Journal

MATERIALS ADVANCES

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