Plasma Charging Damage in HK-First and HK-Last RMG NMOS Devices

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Author(s)

Hiblot, Gaspard

;

Parihar, Narendra

;

Dupuy, Emmanuel

;

Mannaert, Geert

;

Baudot, Sylvain

;

;

;

Vandooren, Anne

;

De Heyn, Vincent

;

Mercha, Abdelkarim

Journal

IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY

Metrics

1864 since deposited on 2022-02-22

Acq. date: 2025-10-28