Publication:

Enabling Non-Actinic EUV Mask Inspection using CNT Pellicle

Date

2021

Proceedings Paper

https://doi.org/10.1117/12.2584695

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Author(s)

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Santoro, Gaetano

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Houchens, Kevin

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Gallagher, Emily

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Timmermans, Marina

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Frommhold, Andreas

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Journal

Proceedings of SPIE

Metrics

1826 since deposited on 2022-03-11

Acq. date: 2026-01-08