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Electromigration limits of copper nano-interconnects
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Authors
Zahedmanesh, Houman
;
Varela Pedreira, Olalla
;
Tokei, Zsolt
;
Croes, Kristof
DOI
10.1109/IRPS46558.2021.9405091
EISBN
978-1-7281-6893-7
ISSN
1541-7026
Conference
IEEE International Reliability Physics Symposium (IRPS)
Journal
na
Title
Electromigration limits of copper nano-interconnects
Publication type
Proceedings paper
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