High resolution dopant/carrier profiling for deep submicron technologies

Thumbnail
Metadata
Show full item record
Authors
Vandervorst, Wilfried; Clarysse, Trudo; De Wolf, Peter; Eyben, Pierre; Haegeman, Bart; Xu, Mingwei; Trenkler, Thomas; Hantschel, Thomas; Stephenson, Robert; Conard, Thierry; De Witte, Hilde
Conference
9th Canadian Semiconductor Technology Conference; July 1999; Ottawa, Canada.
Title
High resolution dopant/carrier profiling for deep submicron technologies
Publication type
Oral presentation
Collections