Publication:
Exploration of Alternative Mask for 0.33NA EUV Single Patterning at Pitch 28nm
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Acq. date: 2026-01-09
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1679 since deposited on 2022-05-22
Acq. date: 2026-01-09
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121 since deposited on 2022-05-22
7last month
2last week
Acq. date: 2026-01-09
Views
1679 since deposited on 2022-05-22
Acq. date: 2026-01-09
Citations