Publication:

iN5 EUV Single Expose Patterning Evaluation for Via Layers

Date

2021

Proceedings Paper

https://doi.org/10.1117/12.2600938

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Author(s)

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Kissoon, Nicola

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Journal

Proceedings of SPIE

Statistics

1369 since deposited on 2022-05-22

Acq. date: 2026-02-27