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Unsupervised Machine Learning based SEM Image Denoising for robust Contour Detection
dc.contributor.author | Dey, Bappaditya | |
dc.contributor.author | Wu, Stewart | |
dc.contributor.author | Das, Sayantan | |
dc.contributor.author | Khalil, Kasem | |
dc.contributor.author | Halder, Sandip | |
dc.contributor.author | Leray, Philippe | |
dc.contributor.author | Samir, Bhamidipati | |
dc.contributor.author | Ahi, Kiarash | |
dc.contributor.author | Pereira, Mark | |
dc.contributor.author | Fenger, Germain | |
dc.contributor.author | Bayoumi, Magdy A. | |
dc.date.accessioned | 2022-05-22T02:19:15Z | |
dc.date.available | 2022-05-22T02:19:15Z | |
dc.date.issued | 2021 | |
dc.identifier.isbn | 978-1-5106-4552-3 | |
dc.identifier.issn | 0277-786X | |
dc.identifier.other | WOS:000792657300017 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/39878 | |
dc.source | WOS | |
dc.title | Unsupervised Machine Learning based SEM Image Denoising for robust Contour Detection | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Dey, Bappaditya | |
dc.contributor.imecauthor | Das, Sayantan | |
dc.contributor.imecauthor | Halder, Sandip | |
dc.contributor.imecauthor | Leray, Philippe | |
dc.contributor.orcidimec | Dey, Bappaditya::0000-0002-0886-137X | |
dc.contributor.orcidimec | Das, Sayantan::0000-0002-3031-0726 | |
dc.contributor.orcidimec | Halder, Sandip::0000-0002-6314-2685 | |
dc.contributor.orcidimec | Leray, Philippe::0000-0002-1086-270X | |
dc.identifier.doi | 10.1117/12.2600945 | |
dc.identifier.eisbn | 978-1-5106-4553-0 | |
dc.source.numberofpages | 15 | |
dc.source.peerreview | yes | |
dc.source.conference | International Conference on Extreme Ultraviolet Lithography | |
dc.source.conferencedate | SEP 27-OCT 01, 2021 | |
dc.source.volume | 11854 | |
imec.availability | Under review |
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