Browsing Conference contributions by author "Nabiollahi, Nabi"
Now showing items 1-4 of 4
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Impact of Cu TSVs on BEOL metal and dielectric reliability
Li, Yunlong; Croes, Kristof; Nabiollahi, Nabi; Van Huylenbroeck, Stefaan; Gonzalez, Mario; Velenis, Dimitrios; Bender, Hugo; Jourdain, Anne; Pantouvaki, Marianna; Stucchi, Michele; Vanstreels, Kris; Van De Peer, Myriam; De Messemaeker, Joke; Wu, Chen; Beyer, Gerald; De Wolf, Ingrid; Beyne, Eric (2014) -
Impact of oxide liner properties on TSV Cu pumping and TSV stress
De Messemaeker, Joke; Varela Pedreira, Olalla; Moussa, Alain; Nabiollahi, Nabi; Vanstreels, Kris; Van Huylenbroeck, Stefaan; Philipsen, Harold; Verdonck, Patrick; Vandevelde, Bart; De Wolf, Ingrid; Beyne, Eric; Croes, Kristof (2015) -
Microstructure simulation of grain growth in Cu Through Silicon Via using phase-field modeling
Nabiollahi, Nabi; Moelans, Nele; Gonzalez, Mario; De Messemaeker, Joke; Wilson, Chris; Croes, Kristof; Beyne, Eric; De Wolf, Ingrid (2014) -
Simulation of Cu pumping during TSV fabrication
Nabiollahi, Nabi; Wilson, Chris; De Messemaeker, Joke; Gonzalez, Mario; Croes, Kristof; Beyne, Eric; De Wolf, Ingrid (2013)