Browsing Conference contributions by imec author "50b14fe26315fb8a065db1909d5d5611f0a8d3e7"
Now showing items 1-5 of 5
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A new method to determine the internal pressure and leakage rate of MEMS packages
Wang, Bo; De Coster, Jeroen; Witvrouw, Ann; Severi, Simone; Wevers, Martine; De Wolf, Ingrid (2013) -
Comparison of three methods to measure the internal pressure of empty MEMS packages
Wang, Bo; Tanaka, Shuji; De Coster, Jeroen; Severi, Simone; Witvrouw, Ann; Wevers, Martine; De Wolf, Ingrid (2012) -
Fast analytical design of poly-SiGe MEMS pressure sensors
Rochus, Veronique; Wang, Bo; Ray Chaudhuri, Ashesh; Helin, Philippe; Severi, Simone; Rottenberg, Xavier (2015) -
Gas leak rate study of MEMS thin film package in different environments
Wang, Bo; De Coster, Jeroen; Wevers, Martine; De Wolf, Ingrid (2014) -
Outgassing study of thin films used for poly-SiGe based vacuum packaging of MEMS
Wang, Bo; Tanaka, Shuji; Guo, Bin; Vereecke, Guy; Severi, Simone; Witvrouw, Ann; Wevers, Martine; De Wolf, Ingrid (2012)