Browsing Conference contributions by imec author "53685eeb9344a9e9e8b1118f601b2c9bcc64a2aa"
Now showing items 1-14 of 14
-
Assessing the prospects of atomic layer deposition for two-dimensional materials in microelectronic applications
Groven, Benjamin; Tomczak, Yoann; Nalin Mehta, Ankit; Bender, Hugo; Zhang, Haodong; Schram, Tom; Smets, Quentin; Heyns, Marc; Caymax, Matty; Radu, Iuliana; Delabie, Annelies (2018) -
Chemical vapor deposition of 2D tin sulfides using SnCl4 and H2S
Zhang, Haodong; Balaji, Yashwanth; Nalin Mehta, Ankit; Caymax, Matty; Radu, Iuliana; Vandervorst, Wilfried; Delabie, Annelies (2018) -
Electrical atomic force microscopy for 2D transition metal dichalcogenide materials
Celano, Umberto; Virkki, Olli; Mascaro, Marco; Nalin Mehta, Ankit; Bender, Hugo; Chiappe, Daniele; Asselberghs, Inge; Paredis, Kristof; Hoflijk, Ilse; Franquet, Alexis; Huyghebaert, Cedric; Radu, Iuliana; Vandervorst, Wilfried (2017) -
Extreme scaling enabled by MX2 transistors: variability challenges (invited)
Smets, Quentin; Arutchelvan, Goutham; Schram, Tom; Verreck, Devin; Groven, Benjamin; Cott, Daire; Ahmed, Zubair; Shi, Yuanyuan; Sutar, Surajit; Nalin Mehta, Ankit; Lin, Dennis; Asselberghs, Inge; Radu, Iuliana (2021) -
Increased WS2 crystal grain size by controlling the nucleation behavior during plasma enhanced atomic layer deposition
Groven, Benjamin; Nalin Mehta, Ankit; Bender, Hugo; Meersschaut, Johan; Conard, Thierry; Franquet, Alexis; Nuytten, Thomas; Vandervorst, Wilfried; Heyns, Marc; Caymax, Matty; Radu, Iuliana; Delabie, Annelies (2018) -
Low temperature source / drain epitaxy and functional silicides: essentials for ultimate contact scaling
Porret, Clément; Everaert, Jean-Luc; Schaekers, Marc; Ragnarsson, Lars-Ake; Hikavyy, Andriy; Rosseel, Erik; Rengo, Gianluca; Loo, Roger; Khazaka, R.; Givens, M.; Piao, Xiaoyu; Mertens, Sofie; Heylen, Nancy; Mertens, Hans; Toledo de Carvalho Cavalcante, Camila; Sterckx, Gunther; Brus, Stephan; Nalin Mehta, Ankit; Korytov, Maxim; Batuk, Dmitry; Favia, Paola; Langer, Robert; Pourtois, Geoffrey; Swerts, Johan; Dentoni Litta, Eugenio; Horiguchi, Naoto (2022) -
Novel Insights into the Homo-/Heteroepitaxy of van der Waals Materials
Mortelmans, Wouter; Nalin Mehta, Ankit; Balaji, Yashwanth; De Smet, Karel; El Kazzi, Salim; Houssa, Michel; De Gendt, Stefan; Heyns, Marc; Merckling, Clement (2020) -
Nucleation of 2D WS2 by plasma enhanced atomic layer deposition from WF6, H2 plasma and H2S - Impact on grain size and charge transport
Groven, Benjamin; Nalin Mehta, Ankit; Smets, Quentin; Schram, Tom; Bender, Hugo; Vandervorst, Wilfried; Radu, Iuliana; Caymax, Matty; Heyns, Marc; Delabie, Annelies (2017) -
Preferential in-plane alignment, twinning and strain in hetero- and homo-epitaxial growth of 2D selenides
Mortelmans, Wouter; Nalin Mehta, Ankit; Balaji, Yashwanth; El Kazzi, Salim; Vanhaeren, Danielle; Conard, Thierry; Meersschaut, Johan; Nuytten, Thomas; De Gendt, Stefan; Heyns, Marc; Merckling, Clement (2019) -
Sources of variability in scaled MoS2 FETs
Smets, Quentin; Verreck, Devin; Shi, Yuanyuan; Arutchelvan, Goutham; Groven, Benjamin; Wu, Xiangyu; Sutar, Surajit; Banerjee, Sreetama; Nalin Mehta, Ankit; Lin, Dennis; Asselberghs, Inge; Radu, Iuliana (2020) -
Tuning of electrical properties in few layer CVD MoS2 through reduction of ambient exposure
Leonhardt, Alessandra; Chiappe, Daniele; Asselberghs, Inge; Pinna, Nicolo; Dabral, Ashish; Nalin Mehta, Ankit; Conard, Thierry; Meersschaut, Johan; Huyghebaert, Cedric; Radu, Iuliana; De Gendt, Stefan (2017) -
Ultra-scaled MOCVD MoS2 MOSFETs with 42nm contacted pitch and 250μA/μm drain current
Smets, Quentin; Arutchelvan, Goutham; Jussot, Julien; Verreck, Devin; Asselberghs, Inge; Nalin Mehta, Ankit; Gaur, Abhinav; Lin, Dennis; El Kazzi, Salim; Groven, Benjamin; Caymax, Matty; Radu, Iuliana (2019) -
Understanding the kinetics of Metal Induced Lateral Crystallization process to enhance the poly-Si channel quality and current conduction in 3-D NAND memory
Ramesh, Siva; Vadakupudhu Palayam, Senthil; Ajaykumar, Arjun; Opsomer, Karl; Bastos, Joao; Ragnarsson, Lars-Ake; Breuil, Laurent; Arreghini, Antonio; Wouters, Lennaert; Spampinato, Valentina; Favia, Paola; Nalin Mehta, Ankit; Carolan, Patrick; Nyns, Laura; Katcko, Kostantine; Stiers, Jimmy; Van den Bosch, Geert; Rosmeulen, Maarten (2021) -
Unravelling Grain Orientation and Stacking Order in Bilayer MoS2 Using Electron Diffraction
Nalin Mehta, Ankit; Gauquelin, Nicolas; Nord, Magnus; Bender, Hugo; Mo, Jiongjiong; Verbeeck, Jo; Vandervorst, Wilfried (2019)