Browsing Conference contributions by imec author "8b87629f405f30678d4177a134e06b2d75e2ce4b"
Now showing items 1-4 of 4
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Implementation of molecular ion implant technology for PMOS extension
Falepin, Annelies; Collart, Erik; Tran, Sandra; Harris, Mark; Ameen, Mike; Hoffmann, Thomas Y.; Rosseel, Erik; Saino, Kanto; Horiguchi, Naoto; Absil, Philippe (2008) -
Influence of the process sequence and termal budget on the strain of SiC stressor layers formed by ion implantation
Rosseel, Erik; Ortolland, Claude; Hikavyy, Andriy; Schram, Tom; Falepin, Annelies; Hoffmann, Thomas Y.; Douhard, Bastien; Moussa, Alain; Vandervorst, Wilfried; Ameen, Mike; Rubin, Leonard (2010) -
Influence of the process sequence and termal budget on the straion fof SiC stressor layers formed by Ion Implantation
Rosseel, Erik; Ortolland, Claude; Hikavyy, Andriy; Schram, Tom; Falepin, Annelies; Hoffmann, Thomas Y.; Vandervorst, Wilfried; Ameen, Mike; Rubin, Leonard (2010-10) -
Ultra shallow junctions formed by sub-melt laser annealing
Falepin, Annelies; Janssens, Tom; Severi, Simone; Vandervorst, Wilfried; Felch, S.B.; Parihar, V.; Mayur, A. (2005)