Browsing Conference contributions by imec author "c99a0125f3368c9025cdc3f1d1b2c2efe142ba04"
Now showing items 1-4 of 4
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Kinetics of chemical etching in nano-confined volumes
Vereecke, Guy; De Coster, Hanne; Carolan, Patrick; Bender, Hugo; Willems, Kherim; Ragnarsson, Lars-Ake; Van Dorpe, Pol; Horiguchi, Naoto; Holsteyns, Frank (2016) -
Understanding the kinetics of Metal Induced Lateral Crystallization process to enhance the poly-Si channel quality and current conduction in 3-D NAND memory
Ramesh, Siva; Vadakupudhu Palayam, Senthil; Ajaykumar, Arjun; Opsomer, Karl; Bastos, Joao; Ragnarsson, Lars-Ake; Breuil, Laurent; Arreghini, Antonio; Wouters, Lennaert; Spampinato, Valentina; Favia, Paola; Nalin Mehta, Ankit; Carolan, Patrick; Nyns, Laura; Katcko, Kostantine; Stiers, Jimmy; Van den Bosch, Geert; Rosmeulen, Maarten (2021) -
Vertically stacked gate-all-around Si nanowire CMOS transistors with dual work function metal gates
Mertens, Hans; Ritzenthaler, Romain; Vaisman Chasin, Adrian; Schram, Tom; Kunnen, Eddy; Hikavyy, Andriy; Ragnarsson, Lars-Ake; Dekkers, Harold; Hopf, Toby; Wostyn, Kurt; Devriendt, Katia; Chew, Soon Aik; Kim, Min-Soo; Kikuchi, Yoshiaki; Rosseel, Erik; Mannaert, Geert; Kubicek, Stefan; Demuynck, Steven; Dangol, Anish; Bosman, Niels; Geypen, Jef; Carolan, Patrick; Bender, Hugo; Barla, Kathy; Horiguchi, Naoto; Mocuta, Dan (2016-12) -
Wet etching of TiN in 1-D and 2-D confined nano-spaces of FinFET transistors
Vereecke, Guy; De Coster, Hanne; Carolan, Patrick; Bender, Hugo; Willems, Kherim; Ragnarsson, Lars-Ake; Van Dorpe, Pol; Horiguchi, Naoto; Holsteyns, Frank (2017)