Publication:

Investigation of access resistance components in Si-channel p-FinFET using cascaded devices.

Date

2022-09
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Author(s)

Eyben, Pierre  
;
Arutchelvan, Goutham  
;
Chiarella, Thomas  
;
Arimura, Hiroaki  
;
Ritzenthaler, Romain  
;
Mitard, Jerome  
;
Dentoni Litta, Eugenio  
;
Horiguchi, Naoto  
;
Goux, Ludovic  

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N/A

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948 since deposited on 2022-08-10
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Acq. date: 2026-06-04

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948 since deposited on 2022-08-10
3last month
Acq. date: 2026-06-04

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