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Investigation of access resistance components in Si-channel p-FinFET using cascaded devices.

dc.contributor.authorEyben, Pierre
dc.contributor.authorArutchelvan, Goutham
dc.contributor.authorChiarella, Thomas
dc.contributor.authorArimura, Hiroaki
dc.contributor.authorRitzenthaler, Romain
dc.contributor.authorMitard, Jerome
dc.contributor.authorDentoni Litta, Eugenio
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorGoux, Ludovic
dc.date.accessioned2024-01-18T09:29:24Z
dc.date.available2022-08-10T10:31:41Z
dc.date.available2024-01-18T09:29:24Z
dc.date.issued2022-09
dc.identifier.issnN/A
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40240.2
dc.titleInvestigation of access resistance components in Si-channel p-FinFET using cascaded devices.
dc.typeMeeting abstract
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorArutchelvan, Goutham
dc.contributor.imecauthorChiarella, Thomas
dc.contributor.imecauthorArimura, Hiroaki
dc.contributor.imecauthorRitzenthaler, Romain
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorDentoni Litta, Eugenio
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorGoux, Ludovic
dc.contributor.orcidimecEyben, Pierre::0000-0003-3686-556X
dc.contributor.orcidimecChiarella, Thomas::0000-0002-6155-9030
dc.contributor.orcidimecRitzenthaler, Romain::0000-0002-8615-3272
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecDentoni Litta, Eugenio::0000-0003-0333-376X
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecGoux, Ludovic::0000-0002-1276-2278
dc.contributor.orcidimecArimura, Hiroaki::0000-0002-3138-708X
dc.date.embargo9999-12-31
dc.source.numberofpages2
dc.source.peerreviewyes
dc.source.conferenceSolid State Devices and Materials - SSDM 2022
dc.source.conferencedate26/09/2022
dc.source.conferencelocationChiba - Japan
dc.source.journalN/A
imec.availabilityPublished - imec


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220.500.12860/40240.2*2024-01-18T09:26:49Zvalidation by library/open access desk
120.500.12860/402402022-08-10T10:31:41Z

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