Publication:
Exploration of alternative mask for 0.33NA extreme ultraviolet single patterning at pitch 28-nm metal design
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1139 since deposited on 2022-08-12
39last month
15last week
Acq. date: 2026-10-13
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1704 since deposited on 2022-08-12
5last month
Acq. date: 2026-10-13
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