Publication:
Exploration of alternative mask for 0.33NA extreme ultraviolet single patterning at pitch 28-nm metal design
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961 since deposited on 2022-08-12
33last month
8last week
Acq. date: 2026-04-07
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1695 since deposited on 2022-08-12
1last month
1last week
Acq. date: 2026-04-07
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