Publication:
Investigation of Dielectric and Quantum Confinement Based Dopant Deactivation in the Extension Region of FinFET
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1281 since deposited on 2022-08-28
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Acq. date: 2025-12-11
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Views
1281 since deposited on 2022-08-28
1last month
1last week
Acq. date: 2025-12-11
Citations