Publication:

Improving polymethacrylate EUV resists with TiO2 area-selective deposition

Date

2022
Proceedings Paper
https://doi.org/10.1117/12.2613815
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Author(s)

Nye, Rachel  
;
Van Dongen, Kaat  
;
Oka, Hironori
;
Furutani, Hajime
;
Parsons, Gregory
;
De Simone, Danilo  
;
Delabie, Annelies  

Journal

Proceedings of SPIE

Abstract

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1223 since deposited on 2022-09-08
Acq. date: 2026-02-26

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1223 since deposited on 2022-09-08
Acq. date: 2026-02-26

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