Publication:

Improved resolution with main chain scission resists for EUV lithography

Date

2022
Proceedings Paper
https://doi.org/10.1117/12.2613445
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Author(s)

Shirotori, Akihide
;
Hoshino, Manabu
;
Rathore, Ashish  
;
Fu, Yeh Sin
;
De Simone, Danilo  
;
Vandenberghe, Geert  
;
Matsumoto, Hirokazu

Journal

Proceedings of SPIE

Abstract

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1222 since deposited on 2022-09-10
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Acq. date: 2026-08-28

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