Analysis of tunneling currents and reliability of NMOSFET's with sub-2 nm gate oxides

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Authors
Yang, N.; Henson, W. K.; Wortman, J. J.
Conference
International Electron Devices Meeting. Technical digest; December 1999; Washington, D.C.
Title
Analysis of tunneling currents and reliability of NMOSFET's with sub-2 nm gate oxides
Publication type
Proceedings paper
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