Publication:
Buried Power Rails and Nano-Scale TSV: Technology Boosters for Backside Power Delivery Network and 3D Heterogeneous Integration
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1863 since deposited on 2022-09-17
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Acq. date: 2026-07-16
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Views
1863 since deposited on 2022-09-17
3last month
3last week
Acq. date: 2026-07-16
Citations