Publication:
Investigation of Low-n Mask in 0.33NA EUV Single Patterning at Pitch 28nm Metal Design
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846 since deposited on 2022-09-19
39last month
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Acq. date: 2026-05-17
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1574 since deposited on 2022-09-19
1last month
Acq. date: 2026-05-17
Citations