Authors

Agnihotri, Om Prakash; Jain, Suresh; Poortmans, Jef; Szlufcik, Jozef; Beaucarne, Guy; Nijs, Johan; Mertens, Robert

Issue

7

Journal

Semiconductor Science and Technology

Volume

15

Title

Advances in low temperature processing of silicon nitride based dielectrics and their applications in surface passivation and integrated optical devices

Publication type

Journal article

Embargo date

9999-12-31