Publication:

Combining TCAD and advanced metrology techniques to support device integration towards N3

Date

2021

Proceedings Paper

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Author(s)

;

De Keersgieter, An

;

Celano, Umberto

;

Wouters, Lennaert

;

Chiarella, Thomas

;

Ritzenthaler, Romain

;

;

Richard, Olivier

;

Paredis, Kristof

;

Matagne, Philippe

;

;

Horiguchi, Naoto

;

Journal

na

Metrics

1460 since deposited on 2022-10-25

Acq. date: 2026-01-07