dc.contributor.author | Eyben, Pierre | |
dc.contributor.author | De Keersgieter, An | |
dc.contributor.author | Celano, Umberto | |
dc.contributor.author | Wouters, Lennaert | |
dc.contributor.author | Chiarella, Thomas | |
dc.contributor.author | Ritzenthaler, Romain | |
dc.contributor.author | Mertens, Hans | |
dc.contributor.author | Richard, Olivier | |
dc.contributor.author | Paredis, Kristof | |
dc.contributor.author | Matagne, Philippe | |
dc.contributor.author | Mitard, Jerome | |
dc.contributor.author | Horiguchi, Naoto | |
dc.contributor.author | Goux, Ludovic | |
dc.date.accessioned | 2022-11-17T14:34:32Z | |
dc.date.available | 2022-10-25T02:54:16Z | |
dc.date.available | 2022-11-17T14:34:32Z | |
dc.date.issued | 2021 | |
dc.identifier.issn | na | |
dc.identifier.other | WOS:000865945700026 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40612.2 | |
dc.source | WOS | |
dc.title | Combining TCAD and advanced metrology techniques to support device integration towards N3 | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Eyben, Pierre | |
dc.contributor.imecauthor | De Keersgieter, An | |
dc.contributor.imecauthor | Celano, Umberto | |
dc.contributor.imecauthor | Wouters, Lennaert | |
dc.contributor.imecauthor | Chiarella, Thomas | |
dc.contributor.imecauthor | Ritzenthaler, Romain | |
dc.contributor.imecauthor | Mertens, Hans | |
dc.contributor.imecauthor | Richard, Olivier | |
dc.contributor.imecauthor | Paredis, Kristof | |
dc.contributor.imecauthor | Matagne, Philippe | |
dc.contributor.imecauthor | Mitard, Jerome | |
dc.contributor.imecauthor | Horiguchi, Naoto | |
dc.contributor.imecauthor | Goux, Ludovic | |
dc.contributor.orcidimec | Eyben, Pierre::0000-0003-3686-556X | |
dc.contributor.orcidimec | De Keersgieter, An::0000-0002-5527-8582 | |
dc.contributor.orcidimec | Celano, Umberto::0000-0002-2856-3847 | |
dc.contributor.orcidimec | Wouters, Lennaert::0000-0002-6730-9542 | |
dc.contributor.orcidimec | Chiarella, Thomas::0000-0002-6155-9030 | |
dc.contributor.orcidimec | Ritzenthaler, Romain::0000-0002-8615-3272 | |
dc.contributor.orcidimec | Richard, Olivier::0000-0002-3994-8021 | |
dc.contributor.orcidimec | Paredis, Kristof::0000-0002-5163-4164 | |
dc.contributor.orcidimec | Mitard, Jerome::0000-0002-7422-079X | |
dc.contributor.orcidimec | Horiguchi, Naoto::0000-0001-5490-0416 | |
dc.contributor.orcidimec | Goux, Ludovic::0000-0002-1276-2278 | |
dc.identifier.eisbn | 978-4-86348-779-6 | |
dc.source.numberofpages | 4 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 84 | |
dc.source.endpage | 87 | |
dc.source.conference | 20th International Workshop on Junction Technology (IWJT) | |
dc.source.conferencedate | JUN 10-11, 2021 | |
dc.source.conferencelocation | Virtual | |
dc.source.journal | na | |
imec.availability | Published - imec | |