Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Conference contributions
View item
imec Publications Repository
imec Publications
Conference contributions
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Combining TCAD and advanced metrology techniques to support device integration towards N3
Metadata
Show full item record
Authors
Eyben, Pierre
;
De Keersgieter, An
;
Celano, Umberto
;
Wouters, Lennaert
;
Chiarella, Thomas
;
Ritzenthaler, Romain
;
Mertens, Hans
;
Richard, Olivier
;
Paredis, Kristof
;
Matagne, Philippe
;
Mitard, Jerome
;
Horiguchi, Naoto
;
Goux, Ludovic
EISBN
978-4-86348-779-6
ISSN
na
Conference
20th International Workshop on Junction Technology (IWJT)
Journal
na
Title
Combining TCAD and advanced metrology techniques to support device integration towards N3
Publication type
Proceedings paper
Collections
Conference contributions
Version history
Version
Item
Date
Summary
2
20.500.12860/40612.2
*
2022-11-17T14:29:05Z
validation by library/open access desk
1
20.500.12860/40612
2022-10-25T02:54:16Z
*Selected version
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login