Combining TCAD and advanced metrology techniques to support device integration towards N3

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Authors
Eyben, Pierre; De Keersgieter, An; Celano, Umberto; Wouters, Lennaert; Chiarella, Thomas; Ritzenthaler, Romain; Mertens, Hans; Richard, Olivier; Paredis, Kristof; Matagne, Philippe; Mitard, Jerome; Horiguchi, Naoto; Goux, Ludovic
EISBN
978-4-86348-779-6
ISSN
na
Conference
20th International Workshop on Junction Technology (IWJT)
Journal
na
Title
Combining TCAD and advanced metrology techniques to support device integration towards N3
Publication type
Proceedings paper
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220.500.12860/40612.2*2022-11-17T14:29:05Zvalidation by library/open access desk
120.500.12860/406122022-10-25T02:54:16Z

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