Publication:
Adhesion and collapse of extreme ultraviolet photoresists and the role of underlayers
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Acq. date: 2026-09-21
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1690 since deposited on 2022-10-29
42last month
11last week
Acq. date: 2026-09-21
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1484 since deposited on 2022-10-29
4last month
Acq. date: 2026-09-21
Citations