Publication:

Adhesion and collapse of extreme ultraviolet photoresists and the role of underlayers

Date

2022
Journal article
https://doi.org/10.1117/1.JMM.21.3.034601
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Published version 1.63 MB

Author(s)

Fallica, Roberto  
;
Chen, Steven
;
De Simone, Danilo  
;
Suh, Hyo Seon  

Journal

JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3

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1566 since deposited on 2022-10-29
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1475 since deposited on 2022-10-29
Acq. date: 2026-06-04

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