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Nucleation and growth mechanism for atomic layer deposition of Al2O3 on two-dimensional WS2 monolayer

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Acq. date: 2026-04-26

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358 since deposited on 2022-12-17
45last month
5last week
Acq. date: 2026-04-26

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1205 since deposited on 2022-12-17
1last month
Acq. date: 2026-04-26

Citations