Publication:

Nucleation and growth mechanism for atomic layer deposition of Al2O3 on two-dimensional WS2 monolayer

Date

2023
Journal article
https://doi.org/10.1116/6.0001913
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Author(s)

Lee, Tsu-Ting
;
Chiranjeevulu, Kashi
;
Pedaballi, Sireesha
;
Cott, Daire  
;
Delabie, Annelies  
;
Dee, Chang-Fu
;
Chang, Edward Yi

Journal

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

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415 since deposited on 2022-12-17
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1207 since deposited on 2022-12-17
1last month
1last week
Acq. date: 2026-08-25

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