Precise optical constants: determination and impact on metrology, simulation and development of EUV masks

Saadeh, Qais; Mesilhy, Hazem; Soltwisch, Victor; Erdmann, Andreas; Ciesielski, Richard; Lohr, Leonhard; Andrle, Anna; Philipsen, Vicky; Thakare, Devesh; Laubis, Christian; Scholze, Frank; Kolbe, Michael

doi:10.1117/12.2643246

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Precise optical constants: determination and impact on metrology, simulation and development of EUV masks

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2022

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https://doi.org/10.1117/12.2643246

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Proceedings of SPIE

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1258 since deposited on 2023-02-15

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Acq. date: 2026-01-11

Precise optical constants: determination and impact on metrology, simulation and development of EUV masks

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