Publication:

Evaluating Forksheet FET Reliability Concerns by Experimental Comparison with Co-integrated Nanosheets

Date

2022
Proceedings Paper
https://doi.org/10.1109/IRPS48227.2022.9764526
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Author(s)

Bury, Erik  
;
Vaisman Chasin, Adrian  
;
Kaczer, Ben  
;
Vandemaele, M.
;
Tyaginov, S.
;
Franco, Jacopo  
;
Ritzenthaler, Romain  
;
Mertens, Hans  
;
Weckx, Pieter  
;
Horiguchi, Naoto  
;
Linten, Dimitri  

Journal

na

Abstract

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1315 since deposited on 2023-02-27
Acq. date: 2026-02-25

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1315 since deposited on 2023-02-27
Acq. date: 2026-02-25

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