Rapid thermal anealing of electro chemically plated Cu films

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Authors
Beyer, Gerald; Kitabijan, P.; Brongersma, Sywert; Proost, Joris; Bender, Hugo; Richard, Emmanuel; Vervoort, Iwan; Hey, P.; Zhang, P.; Maex, Karen
Conference
Advanced Metallization Conference 1999 - AMC 1999
Title
Rapid thermal anealing of electro chemically plated Cu films
Publication type
Proceedings paper
Embargo date
9999-12-31
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