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Investigating metal oxide resists for patterning 28-nm pitch structures using single exposure extreme ultraviolet: defectivity, electrical test, and voltage contrast study
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376 since deposited on 2023-03-01
17last month
3last week
Acq. date: 2026-04-26
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1386 since deposited on 2023-03-01
1last month
Acq. date: 2026-04-26
Citations