Publication:
Extend 0.33 NA extreme ultraviolet single patterning to pitch 28-nm metal design by low-n mask
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Acq. date: 2026-09-01
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725 since deposited on 2023-03-01
75last month
16last week
Acq. date: 2026-09-01
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1373 since deposited on 2023-03-01
Acq. date: 2026-09-01
Citations