Publication:
Extend 0.33 NA extreme ultraviolet single patterning to pitch 28-nm metal design by low-n mask
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Acq. date: 2025-12-14
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1369 since deposited on 2023-03-01
Acq. date: 2025-12-14
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465 since deposited on 2023-03-01
41last month
7last week
Acq. date: 2025-12-14
Views
1369 since deposited on 2023-03-01
Acq. date: 2025-12-14
Citations