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Resist reflow methodology development to investigate interfacial interactions
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Authors
Severi, Joren
;
Chan, Cinzia
;
De Simone, Danilo
;
De Gendt, Stefan
DOI
10.1117/1.JMM.21.4.044602
ISSN
1932-5150
Issue
4
Journal
JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3
Volume
21
Title
Resist reflow methodology development to investigate interfacial interactions
Publication type
Journal article
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2
20.500.12860/41207.2
*
2023-04-06T14:30:01Z
validation by library/open access desk
1
20.500.12860/41207
2023-03-01T03:27:52Z
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