Publication:

Predictive compact model for stress-induced on-product overlay correction

Date

2022
Journal article
https://doi.org/10.1117/1.jmm.21.4.043201
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

Published version 5.89 MB

Author(s)

Zhang, Huaichen
;
Tabery, Cyrus
;
Maas, Ruben
;
Khodko, Oleksandr
;
Blanco, Victor  
;
Canga, Eren  
;
Schleicher, Filip  

Journal

JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3

Abstract

Description

Statistics

Downloads

266 since deposited on 2023-03-01
50last month
15last week
Acq. date: 2026-10-05

Views

1481 since deposited on 2023-03-01
6last month
1last week
Acq. date: 2026-10-05

Citations

Statistics

Downloads

266 since deposited on 2023-03-01
50last month
15last week
Acq. date: 2026-10-05

Views

1481 since deposited on 2023-03-01
6last month
1last week
Acq. date: 2026-10-05

Citations