Publication:
Origin of Voids at the SiO2/SiO2 and SiCN/SiCN Bonding Interface Using Positron Annihilation Spectroscopy and Electron Spin Resonance
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833 since deposited on 2023-03-25
73last month
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884 since deposited on 2023-03-25
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Acq. date: 2026-02-25
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