Publication:
In situ analysis of nucleation reactions during TiCl4/H2O atomic layer deposition on SiO2 and H-terminated Si surfaces treated with a silane small molecule inhibitor
Loading...
Journal
Abstract
Description
Metrics
Downloads
370 since deposited on 2023-05-05
27last month
3last week
Acq. date: 2026-01-09
Views
989 since deposited on 2023-05-05
1last month
Acq. date: 2026-01-09
Citations
Metrics
Downloads
370 since deposited on 2023-05-05
27last month
3last week
Acq. date: 2026-01-09
Views
989 since deposited on 2023-05-05
1last month
Acq. date: 2026-01-09
Citations