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FinFETs with Thermally Stable RMG Gate Stack for Future DRAM Peripheral Circuits
dc.contributor.author | Capogreco, E. | |
dc.contributor.author | Arimura, H. | |
dc.contributor.author | Ritzenthaler, R. | |
dc.contributor.author | Brus, S. | |
dc.contributor.author | Oniki, Y. | |
dc.contributor.author | Dupuy, E. | |
dc.contributor.author | Sebaai, F. | |
dc.contributor.author | Radisic, D. | |
dc.contributor.author | Chan, B. T. | |
dc.contributor.author | Zhou, D. | |
dc.contributor.author | Machkaoutsan, V. | |
dc.contributor.author | Yoon, S. | |
dc.contributor.author | Itokawa, H. | |
dc.contributor.author | Yamaguchi, M. | |
dc.contributor.author | Gao, Z. | |
dc.contributor.author | Fazan, P. | |
dc.contributor.author | Chen, Y. | |
dc.contributor.author | Subramanian, S. | |
dc.contributor.author | Ragnarsson, L. A. | |
dc.contributor.author | Spessot, A. | |
dc.contributor.author | Litta, E. Dentoni | |
dc.date.accessioned | 2023-05-25T20:20:23Z | |
dc.date.available | 2023-05-25T20:20:23Z | |
dc.date.issued | 2022 | |
dc.identifier.issn | 2380-9248 | |
dc.identifier.other | WOS:000968800700079 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41631 | |
dc.source | WOS | |
dc.title | FinFETs with Thermally Stable RMG Gate Stack for Future DRAM Peripheral Circuits | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Capogreco, E. | |
dc.contributor.imecauthor | Arimura, H. | |
dc.contributor.imecauthor | Ritzenthaler, R. | |
dc.contributor.imecauthor | Brus, S. | |
dc.contributor.imecauthor | Oniki, Y. | |
dc.contributor.imecauthor | Dupuy, E. | |
dc.contributor.imecauthor | Radisic, D. | |
dc.contributor.imecauthor | Chan, B. T. | |
dc.contributor.imecauthor | Zhou, D. | |
dc.contributor.imecauthor | Subramanian, S. | |
dc.contributor.imecauthor | Ragnarsson, L. A. | |
dc.contributor.imecauthor | Spessot, A. | |
dc.contributor.imecauthor | Litta, E. Dentoni | |
dc.identifier.doi | 10.1109/IEDM45625.2022.10019422 | |
dc.identifier.eisbn | 978-1-6654-8959-1 | |
dc.source.numberofpages | 4 | |
dc.source.peerreview | yes | |
dc.source.conference | International Electron Devices Meeting (IEDM) | |
dc.source.conferencedate | DEC 03-07, 2022 | |
dc.source.conferencelocation | San Francisco | |
imec.availability | Under review |
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