Publication:

Introduction to imec's AttoLab for ultrafast kinetics of EUV exposure processes and ultra-small pitch lithography

Date

2021-02-22
Presentation
https://doi.org/10.1117/12.2595038
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Author(s)

Holzmeier, Fabian  
;
Dorney, Kevin  
;
Witting Larsen, Esben  
;
Nuytten, Thomas  
;
Singh, Dhirendra  
;
van Setten, Michiel  
;
Vanelderen, Pieter  
;
Bargsten, Clayton
;
Cousin, Seth
;
Raymondson, Daisy
;
Rinard, Eric
;
Ward, Rod
;
Kapteyn, Henry
;
Bottcher, Stefan
;
Dyachenko, Oleksiy
;
Kremzow, Raimund
;
Wietstruk, Marko
;
Pourtois, Geoffrey  
;
van der Heide, Paul  
;
Petersen, John  

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1237 since deposited on 2023-06-13
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Acq. date: 2026-02-25

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