Authors

Vandervorst, Wilfried; Clarysse, Trudo; De Wolf, Peter; Hellemans, L.; Snauwaerts, Jan

Conference

American Vacuum Society Meeting; October 24-28, 1994; Denver, USA.

Title

Lateral and Vertical Dopant Profiling in Semiconductors by Atomic Force Microscopy Using Conducting Tips

Publication type

Oral presentation