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Lateral and Vertical Dopant Profiling in Semiconductors by Atomic Force Microscopy Using Conducting Tips
Publication:
Lateral and Vertical Dopant Profiling in Semiconductors by Atomic Force Microscopy Using Conducting Tips
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Date
1994
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vandervorst, Wilfried
;
Clarysse, Trudo
;
De Wolf, Peter
;
Hellemans, L.
;
Snauwaerts, Jan
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2040
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Acq. date: 2025-12-11
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Metrics
Views
2040
since deposited on 2021-09-29
3
last month
2
last week
Acq. date: 2025-12-11
Citations